JPH0582537B2 - - Google Patents

Info

Publication number
JPH0582537B2
JPH0582537B2 JP20508784A JP20508784A JPH0582537B2 JP H0582537 B2 JPH0582537 B2 JP H0582537B2 JP 20508784 A JP20508784 A JP 20508784A JP 20508784 A JP20508784 A JP 20508784A JP H0582537 B2 JPH0582537 B2 JP H0582537B2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
oscillation
frequency
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20508784A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6182130A (ja
Inventor
Kenkichi Takadera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP20508784A priority Critical patent/JPS6182130A/ja
Publication of JPS6182130A publication Critical patent/JPS6182130A/ja
Publication of JPH0582537B2 publication Critical patent/JPH0582537B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP20508784A 1984-09-28 1984-09-28 表面弾性波圧力センサ Granted JPS6182130A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20508784A JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20508784A JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Publications (2)

Publication Number Publication Date
JPS6182130A JPS6182130A (ja) 1986-04-25
JPH0582537B2 true JPH0582537B2 (en]) 1993-11-19

Family

ID=16501206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20508784A Granted JPS6182130A (ja) 1984-09-28 1984-09-28 表面弾性波圧力センサ

Country Status (1)

Country Link
JP (1) JPS6182130A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053138A (ja) * 2007-08-29 2009-03-12 Seiko Epson Corp Ｓａｗセンサおよびｓａｗセンサ素子

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63164974A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
JPS63164975A (ja) * 1986-12-27 1988-07-08 株式会社　エ−ス電研 ミニゴルフ場
JP4679782B2 (ja) * 1999-12-10 2011-04-27 富士通株式会社 温度センサ
JP4099505B2 (ja) 2003-11-27 2008-06-11 京セラ株式会社 圧力センサ装置
DE112004002281B4 (de) * 2003-11-27 2016-12-22 Kyocera Corp. Drucksensorvorrichtung
JP4511206B2 (ja) * 2004-01-29 2010-07-28 京セラ株式会社 圧力センサモジュール
JP4511208B2 (ja) * 2004-01-29 2010-07-28 京セラ株式会社 圧力センサモジュール
JP4511216B2 (ja) * 2004-02-26 2010-07-28 京セラ株式会社 圧力センサモジュール
DE102008003716A1 (de) 2008-01-09 2009-07-30 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor
JP5262730B2 (ja) * 2009-01-09 2013-08-14 株式会社デンソー 弾性表面波センサおよび弾性表面波センサの圧力測定方法
DE102009031705A1 (de) 2009-07-04 2011-01-05 CiS Institut für Mikrosensorik GmbH Mikromechanischer Drucksensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009053138A (ja) * 2007-08-29 2009-03-12 Seiko Epson Corp Ｓａｗセンサおよびｓａｗセンサ素子

Also Published As

Publication number Publication date
JPS6182130A (ja) 1986-04-25

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